99% purity Tantalum (V) etoxideTa(OC2H5)5

Tantalum(V) ethoxide is an metalorganic compound with formula Ta2(OC2H5)10, often abbreviated as Ta2(OEt)10. It is a colorless solid that dissolves in some organic solvents but hydrolyzes readily. In solution, it aggregates to form bioctahedral dimers with composition [(EtO)4Ta(μ-OEt)]2. Several approaches for preparing tantalum(V) ethoxide are known but salt metathesis from tantalum(V) chloride is generally the most successful synthetic approach. It is mainly used for the manufacture of tantalum(V) oxide thin-film materials by approaches including chemical vapor deposition, atomic layer deposition, and sol-gel processing. These materials have semiconductor, electrochromic, and optical applications.