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Cleaning, Etching Gas

High-purity Fluoromethane CH3F

High-purity Difluoromethane CH2F2

High-purity Trifluoromethane CHF3

High-purity Carbon Tetrafluoride CF4

High Purity Hexafluoroethane C2F6

High-purity Octafluoropropane C3F8

High-purity Octafluorocylcobutane C4F8

High-purity Sulfur Hexafluoride SF6

High-purity Carbon Monoxide CO

High-purity Carbon Dioxide CO2

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